β-Ga2O3 NEMS Oscillator for Real-Time Middle Ultraviolet (MUV) Light Detection

Xu Qian Zheng, Jaesung Lee, Subrina Rafique, Md Rezaul Karim, Lu Han, Hongping Zhao, Christian A. Zorman, Philip X.L. Feng

Research output: Contribution to journalArticle

Abstract

We report on the first beta gallium oxide (β-Ga2O3) crystal feedback oscillator built by employing a vibrating β-Ga2O3 nanoresonator as the frequency reference for real-time middle ultraviolet (MUV) light detection. We fabricate suspended β-Ga2O3 nanodevices through synthesis of β-Ga2O3 nanoflakes using low-pressure chemical vapor deposition (LPCVD), and dry transfer of nanoflakes on microtrenches. Open-loop tests reveal a resonance of the β-Ga2O3 device at ~30 MHz. A closed-loop oscillator is then realized by using a combined optical-electrical feedback circuitry, to perform real-time resonant sensing of MUV irradiation. The oscillator exposed to cyclic MUV irradiation exhibits resonant frequency downshifts, with a measured responsivity of ℜ ≈ -3.1 Hz/pW and a minimum detectable power of δPmin ≈ 0.53 nW for MUV detection.

LanguageEnglish (US)
JournalIEEE Electron Device Letters
DOIs
StateAccepted/In press - Jun 25 2018

Fingerprint

NEMS
Irradiation
Feedback
Low pressure chemical vapor deposition
Gallium
Natural frequencies
Crystals
Oxides
Ultraviolet Rays
gallium oxide

Keywords

  • beta gallium oxide (83β-Ga2O3)
  • Crystals
  • Frequency measurement
  • middle ultraviolet (MUV) light detection
  • Optical resonators
  • oscillator
  • Oscillators
  • Real-time systems
  • Resonant frequency
  • resonator
  • sensor
  • Sensors

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

Cite this

Zheng, X. Q., Lee, J., Rafique, S., Karim, M. R., Han, L., Zhao, H., ... Feng, P. X. L. (Accepted/In press). β-Ga2O3 NEMS Oscillator for Real-Time Middle Ultraviolet (MUV) Light Detection. IEEE Electron Device Letters. https://doi.org/10.1109/LED.2018.2850776

β-Ga2O3 NEMS Oscillator for Real-Time Middle Ultraviolet (MUV) Light Detection. / Zheng, Xu Qian; Lee, Jaesung; Rafique, Subrina; Karim, Md Rezaul; Han, Lu; Zhao, Hongping; Zorman, Christian A.; Feng, Philip X.L.

In: IEEE Electron Device Letters, 25.06.2018.

Research output: Contribution to journalArticle

Zheng, Xu Qian ; Lee, Jaesung ; Rafique, Subrina ; Karim, Md Rezaul ; Han, Lu ; Zhao, Hongping ; Zorman, Christian A. ; Feng, Philip X.L. / β-Ga2O3 NEMS Oscillator for Real-Time Middle Ultraviolet (MUV) Light Detection. In: IEEE Electron Device Letters. 2018.
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